JPH0396355U - - Google Patents
Info
- Publication number
- JPH0396355U JPH0396355U JP532790U JP532790U JPH0396355U JP H0396355 U JPH0396355 U JP H0396355U JP 532790 U JP532790 U JP 532790U JP 532790 U JP532790 U JP 532790U JP H0396355 U JPH0396355 U JP H0396355U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- heater
- crucible
- power supply
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP532790U JP2519505Y2 (ja) | 1990-01-23 | 1990-01-23 | 結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP532790U JP2519505Y2 (ja) | 1990-01-23 | 1990-01-23 | 結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0396355U true JPH0396355U (en]) | 1991-10-02 |
| JP2519505Y2 JP2519505Y2 (ja) | 1996-12-04 |
Family
ID=31509042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP532790U Expired - Lifetime JP2519505Y2 (ja) | 1990-01-23 | 1990-01-23 | 結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519505Y2 (en]) |
-
1990
- 1990-01-23 JP JP532790U patent/JP2519505Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2519505Y2 (ja) | 1996-12-04 |
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